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Investigation of High Electric Field Degradation Effects on Nanoscopic Electrostatic Drive Actuators (NED)
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2021
Master Thesis
Title
Investigation of High Electric Field Degradation Effects on Nanoscopic Electrostatic Drive Actuators (NED)
Thesis Note
Chemnitz, TU, Master Thesis, 2021
Author(s)
Mahanta, Trideep
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Advisor(s)
Ruffert, Christine
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Stolz, Michael
Person Involved
Wunderle, Bernhard
TU Chemnitz
Publishing Place
Chemnitz
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
