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Precision laser droplet soldering of components for Multi Shaped Beam Lithography
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2015
Conference Paper
Title
Precision laser droplet soldering of components for Multi Shaped Beam Lithography
Author(s)
Burkhardt, T.
Mohaupt, M.
Zaage, B.
Beckert, E.
Eberhardt, R.
Tünnermann, A.
Döring, H.-J.
Mainwork
Smart Systems Integration 2015
Conference
Smart Systems Integration Conference (SSI) 2015
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components 2015
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF
