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Travelling wave-driven microfabricated electrohydrodynamic pumps for liquids
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1994
Journal Article
Title
Travelling wave-driven microfabricated electrohydrodynamic pumps for liquids
Author(s)
Fuhr, G.
Schnelle, T.
Wagner, B.
Journal
Journal of micromechanics and microengineering
DOI
10.1088/0960-1317/4/4/007
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
