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Reliability of ultra-thin N2O-nitrided oxides grown by RTP under low pressure and in different gas atmospheres
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2000
Journal Article
Title
Reliability of ultra-thin N2O-nitrided oxides grown by RTP under low pressure and in different gas atmospheres
Author(s)
Beichele, M.
Bauer, A.J.
Ryssel, H.
Journal
Microelectronics reliability
DOI
10.1016/S0026-2714(99)00287-5
Language
English
IIS-B
