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At-wavelength metrology on Sc-based multilayers for the VUV and water window
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2003
Conference Paper
Title
At-wavelength metrology on Sc-based multilayers for the VUV and water window
Author(s)
Schäfers, F.
Yulin, S.
Feigl, T.
Kaiser, N.
Mainwork
Advanced characterization techniques for optics, semiconductors, and nanotechnologies
Conference
Conference on Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies 2003
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF
