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Ion implantation for very large scale integration.
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1982
Journal Article
Title
Ion implantation for very large scale integration.
Other Title
Ionen-Implantation fuer die Hoechstintegration
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Author(s)
Ryssel, H.
Journal
Advances in Electronics and Electron Physics
Language
English
IFT
Keyword(s)
Dotierungsprofil
Höchstintegration
Ionenstrahl
Temperung
