Integration of MEMS models in simulations on electronic system level

This paper presents an efficient approach to extract suitable SystemC AMS models from the Finite Element (FE) descriptions of a MEMS geometry developed in their previous design process. This resulting model must be capable for simulations on Electronic System Level (ESL). The challenge is to generate a model, which shows within a specified range the same behaviour as the netlist from the design data but can be simulated much faster than their FE equivalent. Starting from this netlist of the Finite Element Model (FEM) a suitable Model Order Reduction (MOR) generates a reduced state space description, which is adapted to the considered Degrees of Freedom (DoF) and frequency range. This state space description can be solved by the SystemC AMS implemented state space solver. Furthermore the focus of this paper is the reachable accuracy of the simulated behaviour depending from the selected time resolution and the areas of operation (influence of tension and their frequency).