Remote CMOS pressure sensor chip with wireless power and data transmission

We present a single chip wireless pressure sensor system containing on-chip capacitive pressure arrays, temperature sensor, voltage reference, SC 10bit cyclic ADC, controller, EEPROM and ASK multi-tag RF transponder (133kHz). Carrier power is used for batteryless operation up to 1 m distance. The chip size is 15mm² in 1.5µm CMOS and it consumes less then 180µW during measurement.