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Parylene C Deposition and Characterization of its Barrier Properties for the Encapsulation of MEMS for Medical Applications
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2016
Conference Paper
Titel
Parylene C Deposition and Characterization of its Barrier Properties for the Encapsulation of MEMS for Medical Applications
Author(s)
Selbmann, F.
Baum, M.
Wiemer, M.
Gessner, T.
Hauptwerk
Smart Systems Integration 2016. Proceedings
Konferenz
Smart Systems Integration Conference (SSI) 2016
International Conference and Exhibition on Integration Issues of Miniaturized Systems 2016
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS
