English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Parylene C Deposition and Characterization of its Barrier Properties for the Encapsulation of MEMS for Medical Applications
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
2016
Conference Paper
Title
Parylene C Deposition and Characterization of its Barrier Properties for the Encapsulation of MEMS for Medical Applications
Author(s)
Selbmann, Franz
Baum, Mario
Wiemer, Maik
Geßner, Thomas
Mainwork
Smart Systems Integration 2016. Proceedings
Conference
Smart Systems Integration Conference (SSI) 2016
International Conference and Exhibition on Integration Issues of Miniaturized Systems 2016
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
