English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Smoothing of substrate roughness by carbon-based layers prepared by pulsed laser deposition (PLD)
Details
Full
Export
Statistics
Options
2004
Conference Paper
Titel
Smoothing of substrate roughness by carbon-based layers prepared by pulsed laser deposition (PLD)
Author(s)
Braun, S.
Bendjus, B.
Foltyn, T.
Menzel, M.
Schreiber, J.
Leson, A.
Hauptwerk
Advances in mirror technology for X-ray, EUV lithography, laser, and other applications II
Konferenz
Conference "Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications" 2004
DOI
10.1117/12.560358
Language
English
google-scholar
View Details
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS