• English
  • Deutsch
  • Log In
    Password Login
    or
  • Research Outputs
  • Projects
  • Researchers
  • Institutes
  • Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Konferenzschrift
  4. Smoothing of substrate roughness by carbon-based layers prepared by pulsed laser deposition (PLD)
 
  • Details
  • Full
Options
2004
Conference Paper
Titel

Smoothing of substrate roughness by carbon-based layers prepared by pulsed laser deposition (PLD)

Author(s)
Braun, S.
Bendjus, B.
Foltyn, T.
Menzel, M.
Schreiber, J.
Leson, A.
Hauptwerk
Advances in mirror technology for X-ray, EUV lithography, laser, and other applications II
Konferenz
Conference "Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications" 2004
Thumbnail Image
DOI
10.1117/12.560358
Language
English
google-scholar
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS
  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Send Feedback
© 2022