Spotless arc activated reactive large area EB-PVD of titanium oxide and titanium nitride

Plasma activation of EB-PVD (electron beam physical vapor deposition) allows to increase density, hardness, refractive index and other properties of evaporated coatings. This contribution refers to reactive SAD (spotless arc activated deposition) of coatings from the titanium compounds TiO2 and TiN. Electron beam evaporation is combined with the ignition of a spotless arc discharge on the EB heated titanium metal and additional process gas inlet. The process combination has been extended to large area dimensions. Achieved layer properties, coating rates and layer thickness distributions on large substrates will be presented. The technological capacity of reactive large area SAD will be considered with regard to advantageous applications.