• English
  • Deutsch
  • Log In
    Password Login
    or
  • Research Outputs
  • Projects
  • Researchers
  • Institutes
  • Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Artikel
  4. Vacuum arc with particle filtering
 
  • Details
  • Full
Options
2018
Book Article
Titel

Vacuum arc with particle filtering

Abstract
Driving the cathode spots over the target surface by strong external or intrinsic magnetic fields allows to reduce, but not to suppress the emission of target splinters.
Author(s)
Schultrich, Bernd
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS
Hauptwerk
Tetrahedrally Bonded Amorphous Carbon Films I
Thumbnail Image
DOI
10.1007/978-3-662-55927-7_11
Language
English
google-scholar
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS
  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Send Feedback
© 2022