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1998
Journal Article
Titel

Spanende Mikrobearbeitung für die Mikrooptik

Alternative
Micro-machining for micro-optics
Abstract
Today, excellent methods are available for the production of micro-systems in the sub-micrometer range. However, in cases where structures measured in micrometers are adequate, classical machining methods such as milling, drilling and turning, in refined form, are also particularly suitable.
Author(s)
Gebhardt, A.
Zeitschrift
F und M. Feinwerktechnik, Mikrotechnik, Mikroelektronik
Thumbnail Image
Language
German
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Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF
Tags
  • Mikrostruktur

  • Mikrosystem

  • spanende Bearbeitung

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