2013
Conference Paper
Title

LTCC Membrane mit integrierter Heizern, Temperatur- und Dehnungssensorik

Other Title
LTCC membrane with integrated heaters, temperature sensors and strain gauges
Author(s)
Gutzeit, Nam
Appelfelder, Michael
Reinlein, Claudia
Fischer, Michael  
Müller, Jens  
Mainwork
Conference
Language
German