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  4. Digital programmable pressure sensor with on-chip CMOS signal processing and data storage
 
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1993
Conference Paper
Titel

Digital programmable pressure sensor with on-chip CMOS signal processing and data storage

Abstract
Monolithic sensors can greatly benefit from on-chip electronics since modern signal processsing has a potential to contribute significantly to improving overall sensor performance. This is important because semiconductor sensors usually exhibit crossensitivity and dependence on technology parameters, and also require biasing and signal amplification. This contribution presents a piezoresistive pressure sensor in which all relevant parameters (offset voltage, output signal, temperature coefficient of offset voltage, and sensitivity) are programmable in digital form on the chip. The sensor consists of a square diaphragm with four piezoresistors that form a wheatstone bridge and a programmable, analogue, on-chip readout as well as calibration electronics based on a 3fm n-well CMOS technology. The measuring range of the sensor developed amounts to 1.0 bar (10E5 Pa), the output signal is between 1.2 V (zero signal) and 4.75 V (F.S.O.) at a supply voltage of 8 V to 12 V.
Author(s)
Schlichting, V.
Hammerschmidt, D.
Hosticka, B.J.
Obermeier, E.
Pollak-Diener, G.
Schnatz, F.V.
Hauptwerk
Transducers '93. 7th International Conference on Solid-State Sensors and Actuators. Digest of technical papers
Konferenz
International Conference on Solid-State Sensors and Actuators 1993
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Language
English
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Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS
Tags
  • analoge integrierte S...

  • Druckmessung

  • integrierte Halbleite...

  • Meßwandler

  • microsystem

  • Mikrosystemtechnik

  • monolithic integrated...

  • semiconductor circuit...

  • temperature compensat...

  • Temperaturkompensatio...

  • thermal compensation

  • transducer

  • Wandler

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