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Bending of aluminum alloy beams depending on irradiance and repetition rate of UV laser radiation
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2006
Conference Paper
Title
Bending of aluminum alloy beams depending on irradiance and repetition rate of UV laser radiation
Author(s)
Krellmann, M.
Friedrichs, M.
Dauderstädt, U.
Wagner, M.
Lakner, H.
Mainwork
Reliability, packaging, testing, and characterization of MEMS/MOEMS V
Conference
Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS 2006
DOI
10.1117/12.647358
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
