Stress optimization of a micromechanical torsional spring

In this paper we present a method for the design of a stress-optimized and reliable micromechanical torsional spring. Our optimization approach is based on a software tool for simulation-based optimization - MOSCITO, in combination with the FEM tool ANSYS r. For a specific spring geometry we successfully increase the maximal possible deflection by 30 percent, keeping a given limit for the stress.