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A miniature microwave plasma source used for localized surface treatment and processing
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2009
Conference Paper
Title
A miniature microwave plasma source used for localized surface treatment and processing
Title Supplement
Abstract
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Author(s)
Narendra, J.J.
Grotjohn, T.A.
Asmussen, J.
Mainwork
IEEE 36th International Conference on Plasma Science Abstracts, ICOPS 2009
Conference
International Conference on Plasma Sciences 2009
DOI
10.1109/PLASMA.2009.5227471
Language
English
Fraunhofer-Institut für Lasertechnik ILT
