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Micro-Deformation Analysis and Reliability Estimation of Micro-Components by Means of NanoDAC Technique, in Micro- and Opto-Electronic Materials and Structures
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2007
Book Article
Title
Micro-Deformation Analysis and Reliability Estimation of Micro-Components by Means of NanoDAC Technique, in Micro- and Opto-Electronic Materials and Structures
Author(s)
Michel, Bernd
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
Keller, J.
Mainwork
Micro- and Opto-Electronic Materials and Structures: Physics, Mechanics, Design, Reliability, Packaging. Part 4
DOI
10.1007/0-387-32989-7_29
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
