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Realization of low cost micro coils and usage in different media
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1998
Conference Paper
Title
Realization of low cost micro coils and usage in different media
Author(s)
Marschner, U.
Fischer, W.-J.
Jurisch, R.
Oswald, J.
Peitsch, P.
Mainwork
Micro System Technologies '98
Conference
International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components 1998
Language
English
IMS2
