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Application of FTIR Microscopy for Process Monitoring in Silicon Microreactors
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2000
Conference Paper
Title
Application of FTIR Microscopy for Process Monitoring in Silicon Microreactors
Author(s)
Löbbecke, S.
Schweikert, W.
Türcke, T.
Antes, J.
Marioth, E.
Krause, H.
Mainwork
MICRO.tec 2000. VDE World Microtechnologies Congress: Applications - Trends - Visions. Proceedings. Vol.2
Conference
World Microtechnologies Congress 2000
Language
English
Fraunhofer-Institut für Chemische Technologie ICT
