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Fully Additive Copper Metallization on BCB
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1999
Conference Paper
Title
Fully Additive Copper Metallization on BCB
Author(s)
Stolle, T.
Schwencke, B.
Reichl, H.
Mainwork
Functional materials
Conference
European Conference on Advanced Materials and Processes and Applications (EUROMAT) 1999
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
