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Pumping of water solutions in microfabricated electrohydrodynamic systems
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1992
Conference Paper
Title
Pumping of water solutions in microfabricated electrohydrodynamic systems
Author(s)
Fuhr, G.
Hagedorn, R.
Müller, T.
Benecke, W.
Wagner, B.
Mainwork
MEMS '92. IEEE Workshop on Micro Electro Mechanical Systems. An investigation of micro structures, sensors, actuators, machines and robots
Conference
Workshop on Micro Electro Mechanical Systems (MEMS) 1992
DOI
10.1109/MEMSYS.1992.187685
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
