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Comparison between electron beam evaporation and high-rate sputtering with the plasmatron
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1977
Conference Paper
Title
Comparison between electron beam evaporation and high-rate sputtering with the plasmatron
Author(s)
Schiller, S.
Heisig, U.
Goedicke, K.
Mainwork
IPAT 1977, Conference "Ion Plating & Allied Techniques". Proceedings
Conference
Conference "Ion Plating and Allied Techniques" (IPAT) 1977
Language
English
Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik FEP
