2009
Journal Article
Title

Assessing various analytical techniques with different lateral resolution by investigating spin-coated inorganic contamination on Si surfaces

Author(s)
Grasso, S.
Cazzini, E.
Bersani, M.
Lazzeri, P.
Gennaro, S.
Kolbe, M.
Müller, M.
Kregsamer, P.
Posch, F.
Journal
DOI
Language
English