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Thin Film Encapsulation of High Aspect Ratio Microstructures using sacrificial CF-Polymer
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2007
Conference Paper
Title
Thin Film Encapsulation of High Aspect Ratio Microstructures using sacrificial CF-Polymer
Author(s)
Reuter, D.
Bertz, A.
Gessner, T.
Mainwork
Smart systems integration 2007
Conference
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 2007
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
