3D integration of MEMS and IC: Design, technology and simulations: Advanced processes and materials

A 3D integrated silicon stack consisting of two MEMS devices and two IC devices is presented. The MEMS devices are a pressure sensor and a bulk acoustic resonator (BAR). The stack was constructed for a tire pressure monitoring system (TPMS) which was one out of three demonstrators for an EU funded project called e-CUBES. Thermal simulations were performed to check the level of thermo-mechanical stresses induced on the pressure sensor membrane during extreme environmental conditions. Additional simulations were made to calculate the exact temperature on the BAR device during operation as this was important for the operational frequency. This paper presents and discusses the technology choices made for the stacking of the pressure sensor and the BAR. Results are given from simulations, initial short-loop experiments and for the final stacking.