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Deposition of hard wear-resistant coatings by reactive D.C. plasmatron sputtering
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1984
Journal Article
Title
Deposition of hard wear-resistant coatings by reactive D.C. plasmatron sputtering
Author(s)
Schiller, S.
Heisig, U.
Beister, G.
Steinfelder, K.
Strümpfel, J.
Korndörfer, C.
Sieber, W.
Journal
Thin solid films
DOI
10.1016/0040-6090(84)90196-2
Language
English
Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik FEP