Micro structuring of borosilicate glass by high-temperature micro-forming

A new process technology is presented which allows the direct micro structuring of various glasses, especially bondable borosilicate glass (e.g. Pyrex 7740), by means of forming at high temperatures with a microstructured tool. The technology and fabrication equipment are described on the basis of a molded demonstration structure, and possibilities for application and transfer to industrial manufacturing are shown.