Micromanipulators for a flexible automated assembly of micro optics

In this paper details on the analysis and optimization of a flexure-based micromanipulator for the alignment of optical components will be presented. The developments are motivated by a concept for flexible precision assembly that will be described in the first section. The development of the manipulator itself is based on a systematic approach to first define suitable kinematical structure for a six-axes device. The kinematics have modeled to allow mathematical analyses of the main geometric parameters on relevant performance characteristics. A stepwise optimization procedure has been developed to define the smallest possible configuration of the mechanism for specific workspace requirements. The realized design of the manipulator will be presented which is taking into account further design aspects such as the choice of suitable actuators and the design of flexure joints. By means of interferometer measurements a motion resolution in the nanometer range could be prove d as well as a high repeatability of 0,15 m.