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Problem-adapted 3D finite element modelling for VLSI components
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1997
Conference Paper
Title
Problem-adapted 3D finite element modelling for VLSI components
Author(s)
Döring, R.
Sommer, J.-P.
Dudek, R.
Michel, B.
Mainwork
Micro Materials. Micro Mat '97. Proceedings
Conference
Micro Materials (Micro Mat) 1997
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM