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Traps and trapping phenomena and their implications on electrical behavior of high-k capacitor stacks
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2011
Journal Article
Title
Traps and trapping phenomena and their implications on electrical behavior of high-k capacitor stacks
Author(s)
Paskaleva, A.
Lemberger, M.
Atanassova, E.
Bauer, A.J.
Journal
Journal of vacuum science and technology B. Microelectronics and nanometer structures
Conference
Workshop on Dielectrics in Microelectronics (WoDiM) 2010
DOI
10.1116/1.3521501
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
