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  4. Novel hermetic and low cost glass-capping technology for wafer-level-packaging of optical devices
 
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2010
Conference Paper
Title

Novel hermetic and low cost glass-capping technology for wafer-level-packaging of optical devices

Abstract
The novel wafer-level packaging (WLP) process invented allows hermetic capping of optical devices on wafer-level yielding miniaturized glass cavity windows on top of the optical area, at the same time leaving the contact area accessible for standard electrical connections i.e. wire bond. These optical cavity packages are used within standard chip-on-board (COB) assemblies for high performance optical applications providing high yields and utmost reliability for miniaturized optical devices at low costs.
Author(s)
Hansen, U.
Maus, S.
Leib, J.
Toepper, M.
Mainwork
3rd Electronics System Integration Technology Conference, ESTC 2010. Proceedings. Vol.1  
Conference
Electronics System Integration Technology Conference (ESTC) 2010  
DOI
10.1109/ESTC.2010.5642987
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
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