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  4. Galvanoplated 3D coils for micro systems
 
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1994
Journal Article
Title

Galvanoplated 3D coils for micro systems

Title Supplement
Siehe auch: SÜSS report. Vol.7.
Author(s)
Löchel, B.
Macioßek, A.
König, M.
Quenzer, H.J.
Huber, H.-L.
Journal
Microelectronic engineering  
DOI
10.1016/0167-9317(94)90194-5
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT  
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