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Galvanoplated 3D coils for micro systems
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1994
Journal Article
Title
Galvanoplated 3D coils for micro systems
Title Supplement
Siehe auch: SÜSS report. Vol.7.
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Author(s)
Löchel, B.
Macioßek, A.
König, M.
Quenzer, H.J.
Huber, H.-L.
Journal
Microelectronic engineering
DOI
10.1016/0167-9317(94)90194-5
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT