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1993
Journal Article
Title

Blitzsaubere optische Gläser - ohne FCKW

Abstract
A plasma treatment has been included in the cleaning and drying stage of the manufacturing process of precision optical glas parts. By this treatment the optical properties remain unchanged or are even slightly improved compared to the former treatment with chlorofluorocarbons. The corrosion of the plasma treated alkali metal-silicate glasses that have been studied is inhibited and a much better corrosion resistance is obtained.
Author(s)
Scheerer, F.
Grünwald, H.
Gunkel, C.
Baalmann, A.
Journal
Dünne Schichten  
Language
German
Fraunhofer-Institut für Fertigungstechnik und Angewandte Materialforschung IFAM  
Keyword(s)
  • FCKW

  • Glas

  • optical

  • plasma

  • XPS

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