RFID Sensortransponder mit antiferroelektrischen, eingebetteten Dünnschichtkondensatoren

Miniaturized sensor systems for environmental, building or system monitoring are to record many parameters at the same time and communicate wirelessly. For operation in inaccessible locations, they must also be maintenance-free and have a self-sufficient, battery-free power supply. Storage capacitors are an essential element in the energy management of such sensor systems. Fraunhofer IPMS has been developing high-capacity silicon capacitors for several years, which are particularly well suited for embedding in chip housings due to their low structural height of 50 μm. Passive UHF transponders with various sensors serve as an application example. All of the energy required operating the circuit and sensors obtained from the electromagnetic field of a read/write device and stored in a silicon capacitor integrated in the transponder chip. Experimental setups carried out with chip-on-board assembly and in multi-chip packages.