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In situ thickness determination of multilayered structures using single wavelength ellipsometry and reverse engineering
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2010
Conference Paper
Title
In situ thickness determination of multilayered structures using single wavelength ellipsometry and reverse engineering
Author(s)
Rademacher, D.
Vergöhl, M.
Mainwork
Optical Interference Coatings 2010. CD-ROM
Conference
Optical Interference Coatings Topical Meeting and Tabletop Exhibit (OIC) 2010
Language
English
Fraunhofer-Institut für Schicht- und Oberflächentechnik IST
