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Surface micromachining on silicon with thick layers
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1995
Conference Paper
Title
Surface micromachining on silicon with thick layers
Author(s)
Heuberger, A.
Löchel, B.
Mainwork
PRODUCTRONICA '95. Symposium on Microsystem Technology. Proceedings
Conference
PRODUCTRONICA '95. Symposium on Microsystem Technology 1995
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
