Micromechanical and microtribological properties of thin CNx and DLC coatings

Diamond-like carbon (DLC) can be used as a tribological coatings in mechanical engineering to reduce friction and wear. As well as the amorphous carbon nitride system (CNx), it is also interesting for various applications in the hard-disk and microsystems industries. Here, examples of the influence of film thickness and substrate on the mechanical and tribological properties of thin CNx and DLC films in the low-load regime are analyzed and discussed.