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Minimum oxygen dose for reliable application of SIMOX
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1992
Journal Article
Title
Minimum oxygen dose for reliable application of SIMOX
Author(s)
Badenes, G.
Burbach, G.
Gassel, H.
Vogt, H.
Walter, A.
Journal
Materials Science and Engineering
Conference
Ion Beam Synthesis of Compound and Elemental Layers 1991
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS
Keyword(s)
dose dependence
oxide properties
SIMOX
