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1996
Journal Article
Title
Dünne Schichten zerstörungsfrei prüfen
Other Title
Nondestructive testing of thin films
Abstract
The feasible characterization of layer materials is decisive for optimizing the surface properties and for quality assurance. The module of elasticity and/or density of thin and very thin layers down to 100 nanometres can be determined quickly and reliably by means of high-frequency ultrasonic surface wave,, excited by short laser pulses