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In situ function testing of a dew-point microsensor in the environmental scanning electron microscope
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1994
Conference Paper
Title
In situ function testing of a dew-point microsensor in the environmental scanning electron microscope
Author(s)
Füting, M.
Heinze, D.
March, B.
Steinke, A.
Mainwork
Micro-system technologies '94
Conference
International Conference on Micro Electro, Opto, Mechanic Systems and Components 1994
Language
English
Fraunhofer-Institut für Werkstoffmechanik IWM
