English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
Novel approach to simulation of the silylation bake in the DESIRE process
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
1996
Journal Article
Title
Novel approach to simulation of the silylation bake in the DESIRE process
Author(s)
Weiß, M.
Goethals, M.
Journal
Microelectronic engineering
DOI
10.1016/0167-9317(95)00253-7
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
