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Pulsed laser deposition and patterning of electroceramic thin films
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1994
Conference Paper
Title
Pulsed laser deposition and patterning of electroceramic thin films
Author(s)
Mertin, M.
Offenberg, D.
An, C.W.
Wesner, D.A.
Kreutz, E.W.
Mainwork
Electroceramics IV. Proceedings. Vol.2
Conference
Electroceramics 1994
Language
English
Fraunhofer-Institut für Lasertechnik ILT