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  4. Pulsed laser deposition and patterning of electroceramic thin films
 
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1994
Conference Paper
Title

Pulsed laser deposition and patterning of electroceramic thin films

Author(s)
Mertin, M.
Offenberg, D.
An, C.W.
Wesner, D.A.
Kreutz, E.W.
Mainwork
Electroceramics IV. Proceedings. Vol.2  
Conference
Electroceramics 1994  
Language
English
Fraunhofer-Institut für Lasertechnik ILT  
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