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1994
Conference Paper
Title
PZT-film compositional development and physical properties
Abstract
The preparation-structure-property relationships on relatively thick (0.5-1.5myrn) polycrystalline PZT-films have been studied. The PZT-films were prepared by sol-gel processing from high molarity precursor sols (bigger than 2M) on Pt-metallized polycrystalline, Al203-substrates. Special emphasis was given to the dependence of film properties on Zr/Ti-ratio, Pb-concentration, and thickness Particularly, new approaches are necessary to deduce the familiar material data of compact PZT on films. Laser induced surface acoustic waves proved to be useful to deduce mechanical and geometrical parameters. Electrical scanning force microscopy made nanoscaled poling experiments possible in areas less than 300nm mark 300nm. In order to qualify the material system for application in the printing process the investigation were directed to higher thickness of films, enlarged coating area and improvement of material properties.
Conference
Language
English
Keyword(s)
Al2O3-substrate
electrical scanning force microscopy
high molarity precursor sol
hochmolarer Precursor
Kraftmikroskopie
laser induced surface acoustic wave
laserinduzierte Oberflächenwelle
nanoscaled poling experiment
nanoskalige Polung
polycrystalline PZT-film
polykristallin
PZT film
sol-gel processing
Sol-Gel-Prozeß