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Dual Magnetron Sputter System as dc cathode - an investigation of its electrical properties
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2002
Conference Paper
Title
Dual Magnetron Sputter System as dc cathode - an investigation of its electrical properties
Author(s)
Krause, U.
Rettich, T.
Wiedemuth, P.
Mainwork
European Workshop on Pulsed Plasma Surface Technologies, PPST Europe '02. CD-ROM
Conference
European Workshop on Pulsed Plasma Surface Technologies (PPST Europe) 2002
Language
English
Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik FEP
