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  4. Ferroelectric hafnium oxide: A game changer to FRAM?
 
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2014
Conference Paper
Title

Ferroelectric hafnium oxide: A game changer to FRAM?

Abstract
In this paper the potential of hafnium oxide as a CMOS-compatible ferroelectric for future memory applications is assessed. The high coercive field strength of ferroelectric hafnium oxide is identified as a key parameter being crucial to device performance. It provides the unique thickness and lateral scaling potential of this novel ferroelectric, while at the same time compromises its endurance properties due to large switching fields. Considering the ambivalent nature of this parameter as well as the emerging trade-off between retention and endurance, voltage controlled operation modes and different device concepts for ferroelectric hafnium oxide are discussed.
Author(s)
Müller, J.
Polakowski, P.
Riedel, S.
Mueller, S.
Yurchuk, E.
Mikolajick, T.
Mainwork
14th Annual Non-Volatile Memory Technology Symposium, NVMTS 2014  
Conference
Annual Non-Volatile Memory Technology Symposium (NVMTS) 2014  
DOI
10.1109/NVMTS.2014.7060838
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
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