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Investigation of reactive and nano scale material systems for room-temperature reactive wafer bonding
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2014
Book Article
Title
Investigation of reactive and nano scale material systems for room-temperature reactive wafer bonding
Author(s)
Bräuer, J.
Besser, J.
Wiemer, Maik
Geßner, Thomas
Mainwork
Smart systems integration for micro- and nanotechnologies
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
