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Thermal ALD of SrTiO3 films using Sr(iPr3Cp)2 and Star-Ti
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2010
Conference Paper
Title
Thermal ALD of SrTiO3 films using Sr(iPr3Cp)2 and Star-Ti
Title Supplement
Poster
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Author(s)
Riedel, S.
Fraunhofer-Center Nanoelektronische Technologien CNT
Sundqvist, J.
Fraunhofer-Center Nanoelektronische Technologien CNT
Wilde, L.
Fraunhofer-Center Nanoelektronische Technologien CNT
Boitier, L.
Fraunhofer-Center Nanoelektronische Technologien CNT
Wilde, C.
Blasco, N.
Lachaud, C.
Zauner, A.
Michaelis, A.
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS
Mainwork
Baltic ALD 2010 & GerALD 2. CD-ROM
Conference
Baltic ALD Meeting (BALD) 2010
German ALD Meeting (GerALD) 2010
Language
English
CNT
Keyword(s)
ALD