In-situ broadband monitoring of optical coatings

An in-situ broadband monitoring system was developed and integrated into a Leybold Syrus pro 1100 deposition system equipped with an OMS4000 process spectrophotometer. The broadband monitor is integrated into the optical path of the OMS4000 system and allows recording broadband transmission spectra at the witness glass instantaneously with the OMS4000 reflection measurement or vice versa. First results on the deposition of metal island layers and gradient refractive index layers are presented.